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TESTING CARRIER FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

申请公布号:KR0165154(B1)

申请号:KR19950005363

申请日期:1995.03.15

申请公布日期:1999.02.01

申请人:
FUJITSU LIMITED

发明人:SIKEYUKKI, MARUYAMA

分类号:H01L21/66;G01R1/04;G01R31/28;(IPC1-7):G01R31/26

主分类号:H01L21/66

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