ORGANIC LAYER COMPOSITION, ORGANIC LAYER, AND METHOD OF FORMING PATTERNS
申请公布号:KR20160112847(A)
申请号:KR20150039217
申请日期:2015.03.20
申请公布日期:2016.09.28
发明人:KWON, HYO YOUNG;KIM, SEUNG HYUN;NAMGUNG, RAN;NAM, YOUN HEE;RATHWELL DOMINEA;MUN, SOO HYOUN;JUNG, HYEON IL;HEO, YU MI;SONG, HYUN JI
分类号:G03F7/11;G03F7/09
主分类号:G03F7/11
摘要:The present invention relates to an organic film composition, an organic film produced from the organic film composition, and a method for forming patterns using the organic film composition. The organic film composition comprises: a first polymer including a part represented by chemical formula 1; a second polymer including a part represented by chemical formula 2; and a solvent. The definition of the chemical formula 1 and the chemical formula 2 is the same as described in the specification.
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