DIAMOND SUBSTRATE AND DIAMOND SUBSTRATE MANUFACTURING METHOD,申请号EP20140848179-传众专利搜索

DIAMOND SUBSTRATE AND DIAMOND SUBSTRATE MANUFACTURING METHOD

申请公布号：EP3054036(A1)

申请号：EP20140848179

申请日期：2014.09.25

申请公布日期：2016.08.10

申请人：

NAMIKI SEIMITU HOUSEKI KABUSHIKI KAISHA

发明人：AIDA HIDEO;KOYAMA KOJI;IKEJIRI KENJIRO;KIM SEONGWOO

分类号：C30B29/04;C23C16/27

主分类号：C30B29/04

摘要：A diamond substrate is formed of diamond single crystals by preparing a base substrate; forming plural pillar-shaped diamonds formed of diamond single crystals on one side of the base substrate; causing a diamond single crystal to grow from a tip of each pillar-shaped diamond and coalescing the diamond single crystals growing from the tips of the pillar-shaped diamonds to form a diamond substrate layer; separating the diamond substrate layer from the base substrate; and manufacturing a diamond substrate from the diamond substrate layer, a shape in an in-plane direction of the diamond substrate is a circular shape or a circular shape having an orientation flat plane formed therein and has a diameter of two inches or more.