MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

申请公布号：KR20150136575(A)

申请号：KR20150068794

申请日期：2015.05.18

申请公布日期：2015.12.07

申请人：

CANON KABUSHIKI KAISHA

发明人：NODA KENJI

分类号：H01L21/66;G03F7/20;H01L21/027

主分类号：H01L21/66

摘要：A measuring apparatus includes: an imaging unit disposed on and fixed at the first member; a first detector comprised to detect a location of a stage with respect to the second member; a second detector comprised to detect a change in a location of the first member with respect to the second member; and a control unit comprised to obtain a location of a mark from an image of the mark imaged by the imaging unit while controlling a relative location of the stage for a second member, to reduce a change in a relative location of the mark of the imaging unit by the change in the location of the first member based on the detection results of the first and second detectors.

METHOD OF PREPARING OIL-MINERAL MIXTURE

METHOD OF PRODUCING LIME

PIPELINE FOR CONVEYING HARDENING FILLING MIXTURES

DEVICE FOR TIPPING VESSELS

ARRANGEMENT FOR PLACING DERAILED VEHICLE ON RAILS

ATTACHMENT TO MOTOR CAR REAR BAGGAGE COMPARTMENT

COMPENSATING DEVICE FOR JOINING SECTIONS OF CONTACT SYSTEM

HYDRAULIC DOUBLE-ACTION PRESS

MOULD FOR MANUFACTMBINED PRESSING OF THERMOSETTING PLASTICS AND RUBBER

DEVICE FOR COMPACTING CONCRETE MIXES IN FORM

DEVICE FOR MANUFACTURING WOODEN PALLETS

MANIPULATOR GRIP

UNIT FOR ABRASIVE-JET WORKING OF LARGE VESSELS ,PARTICULARLY, TANK SHELLS

MACHINE FOR CUTTING WORKPIECES

BICYCLE DRIVING WHEEL BUSHING

ARRANGEMENT FOR WELDING MICROWIRE JUMPERS TO CONTACT SPOTS

APPARATUS FOR ELECTRON-BEAM WORKING OF CONDUCTIVE MATERIALS

METHOD AND APPARATUS FOR FEEDING WIRE ELECTRODE

ARRANGEMENT FOR STABILIZING THROUGH FUSION OF NON-ROTATABLE PIPE JOINTS

ARRANGEMENT FOR SEPARATING ROLLED STOCK OF ROUND CROSS SECTION