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SUBSTRATE PROCESSING SYSTEM, AND TRAY TILTING APPARATUS, AND TRAY THEREFOR
申请公布号：KR20140142800(A)
申请号：KR20130064184
申请日期：2013.06.04
申请公布日期：2014.12.15
发明人：WI, KYU YONG;BAIK, CHOON KUM;PARK, HAE YOON;PARK, JUN HYUNG;PARK, JONG DAE;KIM, SUNG WOO
分类号：H01L21/677;B65G49/07;G02F1/13;H01L21/265
主分类号：H01L21/677
摘要：<p>The present invention relates to a substrate processing system and, more specifically, to a substrate processing system processing a substrate placed on a tray thereof, and a tray used by the same. Disclosed is a tray tilting device comprising a tray supporting unit which has a plurality of substrates placed thereon, has a rectangular shape, and supports the tray; a hinge unit supporting the tray supporting unit to rotate the tray supporting unit in order for the tray to rotate around a rotary shaft between the horizontal state of the upper surface of the tray, which is placed on the tray supporting unit, and the tilted state toward the horizontal state of the upper surface; and a rotary driving unit moving the tray supporting unit to at least one side of the upper side and the lower side.</p>
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