放射線源の放射光を集めるための光束誘導光学集光器,申请号JP20100525245-传众专利搜索

放射線源の放射光を集めるための光束誘導光学集光器

申请公布号：JP5654348(B2)

申请号：JP20100525245

申请日期：2008.09.17

申请公布日期：2015.01.14

分类号：H01L21/027;G02B5/10;G03F7/20

主分类号：H01L21/027

摘要：<p>A bundle-guiding optical collector collects an emission of a radiation source and forms a radiation bundle from the collected emission. A reflective surface of the collector is the first bundle-forming surface downstream of the radiation source. The reflective surface is formed such that it converts the radiation source into a family of images in a downstream plane. The family of images includes a plurality of radiation source images which are offset to each other in two dimensions (x, y) in a direction perpendicular to the beam direction of the transformed radiation bundle and are arranged relative to each other in a non-rotationally symmetric manner relative to the beam direction of the transformed radiation bundle. The transformed radiation bundle in the downstream plane has a non-rotationally symmetric bundle edge contour relative to the beam direction of the transformed radiation bundle. The result is a collector in which the radiation bundle shape generated by the collector. In other words, the illumination distribution generated by the collector in a defined manner in the plane downstream of the collector has a shape which is freely selectable to the greatest possible extent.</p>