STAGE DEVICE, DRAWING DEVICE AND METHOD FOR MANUFACTURING ARTICLE,申请号JP20130086059-传众专利搜索

STAGE DEVICE, DRAWING DEVICE AND METHOD FOR MANUFACTURING ARTICLE

申请公布号：JP2014209521(A)

申请号：JP20130086059

申请日期：2013.04.16

申请公布日期：2014.11.06

申请人：

CANON INC

发明人：ISHIKAWA TOMONORI;UCHIDA SHINJI

分类号：H01L21/027;G03F7/20;H01L21/68

主分类号：H01L21/027

摘要：<p>PROBLEM TO BE SOLVED: To provide a stage device which reduces magnetic leakage.SOLUTION: A stage device includes: a stage; a linear motor which drives the stage; a magnetic shield unit which surrounds the linear motor so that a magnetic field generated by a magnet of the linear motor is shielded; and a demagnetizing coil which is arranged in a space surrounded by the magnetic shield unit and demagnetizes the magnetic shield unit.</p>