METHODS AND APPARATUS FOR PROCESSING GERMANIUM CONTAINING MATERIAL, A III-V COMPOUND CONTAINING MATERIAL, OR A II-VI COMPOUND CONTAINING MATERIAL DISPOSED ON A SUBSTRATE USING A HOT WIRE SOURCE,申请号WO2013US75883-传众专利搜索

METHODS AND APPARATUS FOR PROCESSING GERMANIUM CONTAINING MATERIAL, A III-V COMPOUND CONTAINING MATERIAL, OR A II-VI COMPOUND CONTAINING MATERIAL DISPOSED ON A SUBSTRATE USING A HOT WIRE SOURCE

申请公布号：WO2014100049(A1)

申请号：WO2013US75883

申请日期：2013.12.17

申请公布日期：2014.06.26

申请人：

APPLIED MATERIALS, INC.

发明人：PARK, JEONGWON;GRIFFITH CRUZ, JOE;NARWANKAR, PRAVIN K.

分类号：H01L21/20

主分类号：H01L21/20

摘要：<p>Methods and apparatus for processing a germanium containing material, a III-V compound containing material, or a II-VI compound containing material disposed on a substrate using a hot wire source are provided herein. In some embodiments, a method for processing a material disposed on a substrate, wherein the material is at least one of a germanium containing material, a III-V compound containing material, or a II-VI compound containing material, includes providing a hydrogen containing gas to a first process chamber having a plurality of filaments; flowing a current through the plurality of filaments to raise a temperature of the plurality of filaments to a first temperature sufficient to decompose at least a portion of the hydrogen containing gas to form hydrogen atoms; and treating a surface of an exposed material on a substrate by exposing the material to hydrogen atoms formed by the decomposition of the hydrogen containing gas.</p>