Semiconductor chip device with liquid thermal interface material
申请公布号:US8574965(B2)
申请号:US20100910379
申请日期:2010.10.22
申请公布日期:2013.11.05
发明人:REFAI-AHMED GAMAL;SU MICHAEL Z.;BLACK BRYAN
分类号:H01L21/00
主分类号:H01L21/00
摘要:A method of manufacturing is provided that includes providing a semiconductor chip device that has a circuit board and a first semiconductor chip coupled thereto. A lid is placed on the circuit board. The lid includes an opening and an internal cavity. A liquid thermal interface material is placed in the internal cavity for thermal contact with the first semiconductor chip and the circuit board.
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