ADSORPTION APPARATUS
申请公布号:JP2013223914(A)
申请号:JP20120098001
申请日期:2012.04.23
申请公布日期:2013.10.31
发明人:KURAKI DAISUKE;SUNOUCHI AKIHIRO;TANAKA HITOSHI
分类号:B25J15/06
主分类号:B25J15/06
摘要:PROBLEM TO BE SOLVED: To provide an adsorption apparatus in which a piston moves at high speed.SOLUTION: An adsorption apparatus includes: a cylinder 106; a piston 107 that divides the interior of the cylinder 106 into a first chamber (first cylinder chamber 104) and a second chamber (second cylinder chamber 105) and is moved by a pressure difference between the first chamber and the second chamber; a cylinder rod 108 disposed at the piston 107 and projected to the outside of the cylinder 106 through the first chamber; an adsorption pad 102 mounted to the cylinder rod 108 outside the cylinder 106 and having an opening (adsorption pad chamber 109) opened to the outside atmosphere of the cylinder 106; a first flow path 110 allowing communication between the interior of the first chamber and the opening; a second flow path 111 allowing communication between the interior of the second chamber and the opening; and a pump 113 for sucking the internal gas of the first chamber via a third flow path 103.