TUBE-SHAPED SPUTTERING TARGET

申请公布号：KR20120096426(A)

申请号：KR20120016571

申请日期：2012.02.17

申请公布日期：2012.08.30

申请人：

HERAEUS MATERIALS TECHNOLOGY GMBH & CO. KG

发明人：SIMONS CHRISTOPH;SCHLOTT MARTIN;HEINDEL JOSEF;STAHR CHRISTOPH

分类号：C23C14/34

主分类号：C23C14/34

摘要：PURPOSE: A tube-shaped sputtering target is provided to equally form a microstructure across the thickness of a sputtering target and the surface of a jacket by manufacturing the sputtering target in the form of a layer. CONSTITUTION: A tube-shaped sputtering target has a carrier tube and an in-based sputtering material. The sputtering material is arranged in the carrier tube. A microstructure of the sputtering material has a mean particle size below 1mm measured as a mean diameter of the particles on the sputtering-roughened surface of the sputtering material. The sputtering material contains the fraction of 1wt.% of copper and/or gallium at maximum.

TABIL RUEZGARLARIN ENERJISININ YUEKSEK TESIRLI BIR SIKILDE KULLANILMASI

SUBSTITUTED OXOCARBOXYLIC ACIDS PROCESSES FOR THEIR PREPARATION THEIR USE AND MEDICAMENTS CONTAINING THEM

MECHANISM TO ASSURE THE CONTINENCE OF THE STOMAS MADE IN THE DIGESTIVE SYSTEM

PROCESS FOR THE MANUFACTURE OF AN OXO COMPOUND AND NEW INTERMEDIATES REQUIRED THEREFOR

VERFAHREN ZUR HERSTELLUNG VON OH-GRUPPEN ENTHALTENDEN COPOLYMERISATEN

VAGINAL SUPPOSITORY

QUANTITATIVE MEASUREMENT OF MICROORGANISM USING FLUORESCENT ANTIIBODYYANTIGEN REACTION

ESCALATOR STEP

PROCESS FOR PREPARING A LIQUID VACCINE COMPRISING A STABILIZER

PROCESS FOR THE PREPARATION OF NEW 16-METHOXY-16-METHYL-PROSTAGLANDIN E1 DERIVATIVES USEFUL AS GASTROPROTECTIVE AGENTS

METHOD AND DEVICE FOR SLIDINGGBOATTTYPE LIQUIDDPHASE EPITAXIAL GROWTH

IGNITER FOR INTERNAL COMBUSTION ENGINE

COATING DEVICE OF TWIN PACK ADHESIVE

FLOW CONTROL VALVE DEVICE

UN PROCEDIMIENTO PARA LA PREPARACION DE UNA COMPOSICION FORMADORA DE ELASTOMEROS TERMO-CURABLE

PROCEDIMIENTO PARA LA SEPARACION DE LOS DOS ISOMEROS OPTICOS DEL MOPROLOL

MAQUINA DE MOLDEADO POR INYECCION Y SOPLADO

PERFECCIONAMIENTOS EN LOS ENCOFRADOS Y SIMILARES

PERFECCIONAMIENTOS EN LAS MAQUINAS ATADORAS AUTOMATICAS PARA PRENSAS CONTINUASDE LOS DESPERDICIOS D E PAPEL

PERFECCIONAMIENTOS EN LOS MECANISMOS DE ACCION AMIENTO PARA EL AVANCE DE LA CINTA EN LOS APARATOS DE GRABACION Y REPRODUCCION DE CINTA