Refractive optical imaging system, in particular projection objective for microlithography

申请公布号：US7511890(B2)

申请号：US20060347316

申请日期：2006.02.06

申请公布日期：2009.03.31

申请人：

CARL ZEISS SMT AG

发明人：ULRICH WILHELM;SHAFER DAVID;BADER DIETER;EPPLE ALEXANDER

分类号：G02B9/00

主分类号：G02B9/00

摘要：A refractive optical imaging system for imaging an object field arranged in an object surface of the imaging system into an image field arranged in an image surface of the imaging system on a demagnifying imaging scale has a multiplicity of optical elements which are configured and arranged such that a defined finite field curvature of the imaging system is set such that an object surface concavely curved relative to the imaging system is imaged into a flat image surface.

NETWORK CONNECTION SYSTEM

DISTRIBUTED COORDINATION TYPE NETWORK

PORTABLE TELEPHONE BANDS-FREE RECEIVER CONNECTED WITH SPEAKER OF CAR ACOUSTIC SYSTEM

METHOD AND SYSTEM FOR SPECIFYING FAULTY POSITION

OPTICAL CAMERA-SHAKE CORRECTION DEVICE

REFRIGERATOR ENABLING USER TO WRITE MEMO ON

INFRARED RAY ABSORPTION FILTER

SEMICONDUCTOR WAFER POLISHING METHOD AND POLISHING EQUIPMENT AND POLISHED WAFER

SWITCHGEAR

CHILLER

TOTAL HEAT EXCHANGE ELEMENT

CORE LAYERING DEVICE OF DYNAMOELECTRIC MACHINE

GENERATOR

CLOTH BASE FOR LOUDSPEAKER AND THE LOUD SPEAKER USING THE SAME

TELEVISION RECEIVER

VIDEO CAMERA

MOTOR

REVERSE-ROTATION PREVENTING DEVICE FOR SYNCHRONOUS MOTOR

INTERPOLATION ARITHMETIC UNIT AND ITS METHOD

COLOR PROCESSING METHOD AND ITS DEVICE