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Electromagnetic micro-generator
申请公布号：EP1841049(A1)
申请号：EP20060111810
申请日期：2006.03.28
申请公布日期：2007.10.03
发明人：KVISTEROY, TERJE
分类号：H02K35/02
主分类号：H02K35/02
摘要：A micro-generator comprises an integrated circuit (IC) wafer. A micro-electro mechanical system (MEMS) wafer is bonded to the IC wafer and comprises a micromechanical element arranged to move in use. A plurality of first metal coils with associated plural trenches are realised as part of the IC wafer and/or the MEMS wafer. Plural micro-magnets are provided, one associated with each trench and are formed from a magnet layer deposited, plated or bonded to the MEMS wafer or IC wafer. Movement of the micro-mechanical element, in use, generates a voltage in the coils.