INSPECTION DEVICE AND METHOD FOR SEMICONDUCTOR INTEGRATED CIRCUIT
申请公布号:JP2007010440(A)
申请号:JP20050190813
申请日期:2005.06.30
申请公布日期:2007.01.18
发明人:HIRAE KOUICHI
分类号:G01R31/26;H01L21/66;H01L21/822;H01L27/04
主分类号:G01R31/26
摘要:PROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor integrated circuit capable of precisely acceptance determination by IDDQ inspection even if there are variations in manufacturing. SOLUTION: A plurality of semiconductor devices on the surroundings of a object semiconductor device 110 to be inspected are selected as reference semiconductor devices 120. IDDQ is measured by providing a predetermined inspection pattern to the selected semiconductor devices 120 and the object semiconductor devices 110 respectively. A reference value is calculated from IDDQ measurement value of each semiconductor device 120 and then compared with IDDQ measurement value of the object semiconductor device 110. The acceptance determination of the object semiconductor device 110 is conducted by a result of the comparison. COPYRIGHT: (C)2007,JPO&INPIT
JOINT, CONNECTING STRUCTURE AND FRAME BODY
ROOF CONSTRUCTION METHOD FOR WOODEN STRUCTURE AND ROOF STRUCTURE
INSTALLING STRUCTURE OF PARTITION PANEL AND EXECUTION WORK METHOD THEREFOR
CONNECTING STRUCTURE OF WALL PANEL AND CEILING PANEL OF UNIT ROOM
CONNECTING DEVICE IN LOW PARTITION
CONNECTING STRUCTURE OF WALL PANEL OF UNIT ROOM
TERMINATE PREVENTION STRUCTURE OF BUILDING
JOINT STRUCTURE BETWEEN REINFORCED CONCRETE COLUMN AND REINFORCED BEAM
COLUMN-BEAM CONNECTION STRUCTURE OF STEEL FRAME
CONSTRUCTION FOR PREVENTING INGRESS OF FOREIGN MATTERS AT LID PORTION OF GUTTER
CUTOFF STRUCTURE OF BATHROOM WALL PANEL
ROOF DEVICE FOR OUTDOOR TEMPORARY VIEWING FACILITY OR THE LIKE
JOINT STRUCTURE OF HORIZONTAL MEMBER AND JOINT HARDWARE OF HORIZONTAL MEMBER USED THEREFOR
EXTERNAL HEAT INSULATION TYPE WATERPROOFING WORK METHOD FOR BALCONY
SMALL-SIZED CONSTRUCTION MACHINE
ENERGY ABSORBING STRUCTURE IN PILE TOP JOINING PART
SOIL DRESSING AND LINING BLOCK
METHOD, DEVICE AND SYSTEM OF DETECTING GROUND LIQUEFACTION
BOREHOLE LOADING TEST METHOD, AND FUNCTIONAL HOLE HOLDING PIPE TYPE BOREHOLE LOADING TEST APPARATUS