SCANNING FRAMING BLADE APPARATUS,申请号EP20010918875-传众专利搜索

SCANNING FRAMING BLADE APPARATUS

申请公布号：EP1275029(A4)

申请号：EP20010918875

申请日期：2001.03.22

申请公布日期：2006.10.18

申请人：

ASML HOLDING N.V.

发明人：GALBURT, DANIEL, N.;TAM, WAIMING

分类号：G03F7/20;H01L21/027;H02K7/08;H02K41/03

主分类号：G03F7/20

摘要：A scanning framing blade apparatus includes a stationary assembly having a plurality of magnets; first and second carriage assemblies that each have a plurality of coils. The first and second carriage assemblies are supported on the stationary assembly by a plurality of air bearings that permit the first and second carriage assemblies to move in only one degree of freedom. In addition, the scanning framing blade apparatus includes first and second framing blades that are attached to the first and second carriage assemblies, respectively. The scanning framing blade apparatus also includes a controller that is coupled to the plurality of coils. The controller is adapted to energize at least one of the plurality of coils, thereby causing at least one of the carriage assemblies and corresponding framing blade to move in the one degree. This motion controls illumination onto a reticle during a substrate scanning process.