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ELECTRONIC DEVICES

申请公布号:KR20050089826(A)

申请号:KR20057010905

申请日期:2003.12.12

申请公布日期:2005.09.08

申请人:
PLASTIC LOGIC LIMITED

发明人:BROWN THOMAS MEREDITH;SIRRINGHAUS HENNING

分类号:H01L21/762;H01L51/00;H01L51/05;H01L51/10;H01L51/30;H01L51/40;(IPC1-7):H01L51/20

主分类号:H01L21/762

摘要:A method for forming an electronic device in a multilayer structure comprising the steps of: defining a topographic profile in a laterally extending first layer; depositing at least one non-planarizing layer on top of the first layer such that the topographic profile of the surface of the or each non-planarizing layer conforms to that of the laterally extending first layer; and depositing a pattern of at least one additional layer onto the top-most non- planarizing layer, such that the lateral location of the additional layer is defined by the shape of the topographic profile of the non-planarizing layer, and whereby the additional layer is laterally aligned with the topographic profile in the first layer.

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