NEW MATERIAL AND METHOD OF FABRICATION THEREFOR
申请公布号:WO2005066073(A1)
申请号:WO2004GB05243
申请日期:2004.12.15
申请公布日期:2005.07.21
发明人:DUNKLEY, JOHN, JOSEPH;TELFORD, BRETT;CONNOR, STEPHEN, EDWARD
分类号:C01B33/02;C30B15/04;C30B31/06;(IPC1-7):C01B33/02
主分类号:C01B33/02
摘要:<p>The present invention concerns new methods of fabricating a silicon material comprising phosphorus. The methods allow high levels of phosphorus to be combined with the silicon. In one aspect of the invention a sample of phosphorus is surrounded with a sample of silicon. At least some of the phosphorus is then vaporised and caused to interact with the silicon.</p>