Method of manufacturing a semiconductor device

申请公布号：GB0506567(D0)

申请号：GB20050006567

申请日期：2002.02.18

申请公布日期：2005.05.04

申请人：

NEC ELECTRONICS CORPORATION

分类号：H01L21/02;H01L21/314;H01L21/316;H01L21/318;H01L21/768;H01L23/532

主分类号：H01L21/02

摘要：<p>In a damascene method, trenches in interlayer insulation 12 are filled with a barrier layer, a seed layer and a copper containing layer 17. The surface of the copper layer 17 is kept free of copper oxide by not exposing the device to an oxygen containing atmosphere. The oxide-free surface of the copper is subjected to a N2 or NH3 nitriding plasma treatment to form a copper nitride (CuN) layer 24. A silicon containing copper diffusion prevention layer 18 (e.g. SiN, SiON, SiC, SiCOH) is formed by plasma CVD. The copper nitride layer 24 suppresses diffusion of silicon into the copper layer 17 such that the thickness of the copper silicide layer is reduced. Interconnection resistance is thus reduced.</p>

DIP AND READ TEST DEVICE

KAGAKUSENINO SETSUDANBUSHORIHOHO OYOBI SOCHI

SOSUISEISENINO SENSHOKUHO

RYOSOKUTACHOHIRIKISHOKUKI NIOKERU YOBIHISENTAKUSOCHI

ICHIDAINO SHASHUTSUKIOSHOSHITAHATSUHOSANDOITSUCHISEIKEIHOHO

TASOYOKINO FUKIKOMISEIKEIHO

NETSUKOKASEIJUSHINO FUKIKOMISEIKEIHO

KABEKOZOTAI OYOBI SUIEIPUURUKOZOTAI

INSBESONDERE AN DEN LEITERHOLMEN EINER ZUSAMMENKLAPPBAREN MEHRZWECKLEITER ZU BEFESTIGENDES, IN MEHREREN STELLUNGEN VERRIEGELBARES GELENK

SYSTEM FUER SYNCHRONE DATENUEBERTRAGUNG UEBER EINEN SYNCHRONEN DIGITALEN UEBERTRAGUNGSKANAL

ARYLSULFONSAEURE-BROMPHENYLESTER, DEREN HERSTELLUNG UND VERWENDUNG ALS FLAMMSCHUTZMITTEL

MULTIZONALES NICHTGEWEBTES TEXTILES FLAECHENGEBILDE UND VERFAHREN ZU SEINER HERSTELLUNG

FUTTERMITTEL FUER TIERE

VERFAHREN ZUR HERSTELLUNG VON SILIZIUMKARBIDKRISTALLEN

VERFAHREN UND VORRICHTUNG ZUM STEUERN DER DREHGESCHWINDIGKEIT EINES ROTORS

Tunnel connecting parallel tunnels - has pilot hole drilled between tunnels and boring tool pulled back to enlarge bore

Inhibition of hydrogen corrosion of graphite in gas-cooled reactors - by adding small amt of nitrogen continuously to rare gas, for economy

VERFAHREN ZUR HERSTELLUNG VON 1,6-HEXANDIOL AUS CYCLOHEXAN

KOGATAATSUDENSHINDOSHINOKIMITSUYOKI

TEREBIJONSHINGOHENKANSOCHI