Microelectromechanical device packages with integral heaters

申请公布号：US2004232535(A1)

申请号：US20030443318

申请日期：2003.05.22

申请公布日期：2004.11.25

申请人：

TARN TERRY

发明人：TARN TERRY

分类号：B81B7/00;G02B26/08;H01L23/10;(IPC1-7):H01L23/02

主分类号：B81B7/00

摘要：A microelectromechanical device package with integral a heater and a method for packaging the microelectromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together.

FORMING METHOD OF IMPURITY DIFFUSED LAYER

MANUFACTURING METHOD OF RUBBER MAGNET

METHOD OF MANUFACTURING HONEYCOMB HEATER

HEATING CLOTH

ALUMINUM ELECTROLYTIC CONDENSER

ARC FURNACE CONTROLLER

BUFFER TYPE GAS BREAKER

VACUUM VALVE

CONTROL CIRCUIT FOR DC CIRCUIT BREAKER

PAPER FEEDER

VINYL COMTAINING COLOR DEVELOPABLE COMPOUND

Piston with spring loaded segmented rings - has broad compression ring at top of ring set to accommodate cylinder bore ovality

Bolted collar for overlap joint of mine prop - uses two winged U=sections with outer section having contoured cantilevers seating jacking stirrup

Easily struck non-metallic concrete shutter panel - has smooth plastic facing flexibly reinforced

Convex ribs within concave bases on blow moulded bottles - to limit axial penetration by bottle tops when stacked

Reinforcement for grip of key - comprises front and back plates with central spacers with cut=outs receiving head of key

Oil removal from waste water - by filtration through oleophilic fibrous material with periodic automatic regeneration

Overhead cable transporter system - has two endless driven cables supporting trolley with duplicate system by side for sharing heavy loads

Assembly of car registration plates - uses separate moulded characters clipped into plate by single cutting and pressing tool

Repetitive positioning of cigar wrapper for optimum use - involves comparing each half leaf with model profile and modifying it according to defects