METHOD AND APPARATUS FOR FABRICATING NANOSCALE STRUCTURES,申请号WO2004GB00849-传众专利搜索

METHOD AND APPARATUS FOR FABRICATING NANOSCALE STRUCTURES

申请公布号：WO2004076049(A3)

申请号：WO2004GB00849

申请日期：2004.03.01

申请公布日期：2004.11.11

申请人：

UNIVERSITY OF SURREY;COX, DAVID, CHRISTOPHER;FORREST, ROY, DUNCAN;SILVA, SEMBUKUTIARACHILAGE, RAVI

发明人：COX, DAVID, CHRISTOPHER;FORREST, ROY, DUNCAN;SILVA, SEMBUKUTIARACHILAGE, RAVI

分类号：B81C99/00;H01J9/02;H01L51/00;H01L51/30

主分类号：B81C99/00

摘要：An apparatus comprises a scanning electron microscope (SEM) (1) positioned over a manipulation chamber (2) which houses a sample holder (3). The walls of the manipulation chamber (2) support two probes (4, 4a) and the sample holder (3) is able to hold a sample (5), such as carbon nanotubes (10a) carried on a substrate (10). The apparatus can selectively move and apply voltages and currents to the probe or probes (4, 4a) and sample holder (3) under the SEM (1). By controlling the current that is passed across a contact between the probe (4) and a carbon nanotube (10a), a conditioned weld is formed. Likewise, by controlling the current that is passed along a carbon nanotube (10a), the nanotube (10a) can be annealed. Using both the probes (4, 4a) a carbon nanotube can be held and cut at any position along its length. This allows the formation of novel carbon nanotube structures.