Method to produce a reliable piezoelectric thick film on a substrate,申请号US20030680229-传众专利搜索

Method to produce a reliable piezoelectric thick film on a substrate

申请公布号：US2004071864(A1)

申请号：US20030680229

申请日期：2003.10.08

申请公布日期：2004.04.15

申请人：

YAO KUI;HE XU JIANG;XU YUAN;TAY ENG HOCK FRANCIS

发明人：YAO KUI;HE XU JIANG;XU YUAN;TAY ENG HOCK FRANCIS

分类号：C04B35/49;B28B1/30;C04B35/491;C23C18/12;H01L41/08;H01L41/09;H01L41/187;H01L41/22;H01L41/24;(IPC1-7):B05D5/12

主分类号：C04B35/49

摘要：A method of producing a piezoelectric ceramic thick film on a substrate, said method comprising: providing a piezoelectric ceramic material in powder form; forming a liquid mixture by mixing the powdered material with a liquid phase precursor of a metal oxide of low-melting point, said precursor being adapted to decompose, upon subsequent annealing, into the metal oxide; drying the liquid mixture to form a precipitate; milling the precipitate to form a powdered precipitate; adding an organic carrier to the powdered precipitate; further milling the precipitate to form a paste; depositing a layer of the paste, as a wet film, onto the substrate; and annealing the layered substrate at a temperature and for a time sufficient to cause transformation of the paste into the thick film.