VACUUM COMPATIBLE LINEAR MOTION DEVICE

申请公布号：EP0883892(B1)

申请号：EP19970953082

申请日期：1997.12.10

申请公布日期：2004.03.10

申请人：

APPLIED MATERIALS, INC.

发明人：TROST, DAVID;VENEKLASEN, LEE

分类号：F16C29/00;F16C29/02;F16C32/06;G03F7/20;H01J37/20;H01J37/305;H01L21/027;(IPC1-7):H01J37/20

主分类号：F16C29/00

摘要：<p>A vacuum compatible linear motion device having a fluid bearing is contained within a vacuum chamber having a working pressure of significantly less than one atmosphere. The fluid bearing is contained within a vacuum enclosure within the vacuum chamber and is maintained at a pressure higher than that of the vacuum chamber but less than one atmosphere, thus essentially isolating the fluid bearing. A moveable payload is coupled to the linear motion device such that linear motion in the direction of the long axis of the device is provided to the moveable payload.</p>

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