SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER AND ITS MANUFACTURING METHOD,申请号JP20010399665-传众专利搜索

SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER AND ITS MANUFACTURING METHOD

申请公布号：JP2003201124(A)

申请号：JP20010399665

申请日期：2001.12.28

申请公布日期：2003.07.15

申请人：

ASAHI GLASS CO LTD

发明人：IKUTA YORISUKE;IWAHASHI KOSHIN

分类号：G02B1/00;C03B8/04;C03B20/00;H01L21/027;(IPC1-7):C03B8/04

主分类号：G02B1/00

摘要：PROBLEM TO BE SOLVED: To provide a method for stably manufacturing synthetic quartz glass which is excellent in light resistance and light transmissivity and which contains high concentration of fluorine. SOLUTION: The method incorporates a process for controlling OH group content in the porous quartz glass by holding the porous quartz glass in a steam-containing atmosphere, a process for doping the porous quartz glass with fluorine and simultaneously reducing the OH group content by holding the porous quartz glass in a fluorine compound-containing atmosphere and a process for obtaining a transparent quartz glass body by heating the porous quartz glass at≥1,300°C and converting the porous quartz glass to transparent glass. COPYRIGHT: (C)2003,JPO