PLANAR TYPE GALVANO-MIRROR,申请号JP20010084641-传众专利搜索

PLANAR TYPE GALVANO-MIRROR

申请公布号：JP2002287046(A)

申请号：JP20010084641

申请日期：2001.03.23

申请公布日期：2002.10.03

申请人：

MIYOTA KK

发明人：AIBA HIROHIKO

分类号：G02B26/08;G02B7/182;H04N1/113;(IPC1-7):G02B26/08

主分类号：G02B26/08

摘要：PROBLEM TO BE SOLVED: To provide a planar type galvano-mirror which can obtain specific rotary torque in a movable plate with a small consumed current and improve the flatness of a reflecting mirror. SOLUTION: A semiconductor device has a circular flat plate type movable plate and a torsion bar, pivoting the movable plate on the semiconductor device in a swinging state, formed integrally in a hollow state and a circular plane coil is provided on the top surface of the movable plate and a reflecting mirror is provided on the reverse surface. The semiconductor device is mounted on a base substrate, and a sectorial or semicircular permanent magnet which is paired to exert a magnetic field on the circular plane coil is fixed to the internal wall of a yoke, which is arranged across the torsion bar. A pattern part provided on the base substrate and a pattern part formed on the semiconductor substrate are electrically connected to each other.