Composition and process for forming electrically insulating thin films
申请公布号:EP0869516(B1)
申请号:EP19980105810
申请日期:1998.03.30
申请公布日期:2002.09.11
发明人:KOBAYASHI, AKIHIKO;MINE, KATSUTOSHI;NAKAMURA, TAKASHI;SASAKI, MOTOSHI;SAWA, KIYOTAKA
分类号:C09D5/25;C09D7/12;C09D125/02;C09D127/12;C09D129/10;C09D179/08;C09D183/04;C09D183/05;C09D201/00;H01B3/30;H01B3/42;H01B3/46;H01L21/312;H01L21/316;(IPC1-7):H01B3/46;C04B41/50
主分类号:C09D5/25