Verfahren zur Herstellung einer Mikrostruktur in einem Substrat aus ferroelektrischem Einkristall

申请公布号：DE69802727(D1)

申请号：DE1998602727

申请日期：1998.03.02

申请公布日期：2002.01.17

申请人：

NGK INSULATORS, LTD.

发明人：KAWAGUCHI, TATSUO;IMAEDA, MINORU

分类号：G02B6/13;C30B29/30;C30B33/00;C30B33/10;G02F1/355;G02F1/37

主分类号：G02B6/13

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