Illumination optical system in exposure apparatus

申请公布号：US2001033433(A1)

申请号：US20010797847

申请日期：2001.03.05

申请公布日期：2001.10.25

申请人：

SHINODA KEN-ICHIRO

发明人：SHINODA KEN-ICHIRO

分类号：G02B21/08;G02B27/00;G02B27/18;G03F7/20;H01L21/027;(IPC1-7):G02B27/02

主分类号：G02B21/08

摘要：Disclosed is an illumination optical system including an optical integrator for forming a secondary light source by use of light from a light source, and a condenser optical system for condensing light from the optical integrator upon a surface to be illuminated, wherein the condenser optical system is arranged to change, independently of each other, an illuminance distribution and an angular distribution of the light incident on the surface illuminated.

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