Method and apparatus for preparing integrated circuit thin films by chemical vapor deposition
申请公布号:US6110531(A)
申请号:US19970892485
申请日期:1997.07.14
申请公布日期:2000.08.29
发明人:PAZ DE ARAUJO, CARLOS A.;MCMILLAN, LARRY D.;SOLAYAPPAN, NARAYAN;BACON, JEFFREY W.
分类号:B05D1/00;B05D1/04;B05D3/04;B05D7/24;C23C4/12;C23C16/02;C23C16/40;C23C16/44;C23C16/448;C23C16/455;C23C16/46;C23C16/48;C23C16/52;C23C16/56;C23C18/12;C23C18/14;C23C26/02;C30B7/00;C30B25/02;H01C7/10;H01L21/02;H01L21/314;H01L21/316;H01L27/108;H01L27/115;H01L41/24;H05K3/10;(IPC1-7):C23C16/40;C23C16/18;H01L21/31
主分类号:B05D1/00
摘要:A mist is generated by a venturi from liquid precursors containing compounds used in chemical vapor deposition, transported in carrier gas through tubing at ambient temperature, passed into a heated zone where the mist droplets are gasified at a temperature of between 100 DEG C. and 200 DEG C., which is lower than the decomposition temperature of the precursor compounds. The gasified liquid is injected through an inlet assembly into a deposition reactor in which there is a substrate heated to from 400 DEG C. to 600 DEG C., on which the gasified compounds decompose and form a thin film of layered superlattice compound.
PROCESS FOR PREPARATION OF ORGANIC CHEMICALS
A PROCESS FOR FRACTIONING CROP INTO INDUSTRIAL RAW MATERIAL
BEVERAGE CAN WITH MOUTHPIECE AND PROCESS FOR FILLING THE CAN
DEVICES AND SYSTEMS BASED ON NOVEL SUPERCONDUCTING MATERIAL
VERFAHREN ZUR HERSTELLUNG EINES DRUCKGASBEHAELTERS AUS AUSTENITISCHEN STAEHLEN DURCH KRYOVERFORMUNG
SYSTEM FOR DESIGNATING PROGRAM
BROADCASTING SYSTEM DISCRIMINATING CIRCUIT
REMOTE OPERATION DEVICE FOR CAMERA OF CAMERA CRANE AND THE LIKE
CIRCUIT FOR SOLVING ERROR POSITION POLYNOMIAL
TELEVISION TELEPHONE SET WITH FUNCTION FOR AUTOMATIC ANSWERING