Inspection technique of photomask

申请公布号：US6091845(A)

申请号：US19980028878

申请日期：1998.02.24

申请公布日期：2000.07.18

申请人：

MICRON TECHNOLOGY, INC.

发明人：PIERRAT, CHRISTOPHE;BURDORF, JAMES

分类号：G01N21/956;G03F1/00;G03F7/20;G06T7/00;(IPC1-7):G06K9/82

主分类号：G01N21/956

摘要：An improved technique for inspecting photomasks employs simulated images of the resist pattern. A simulated image of an original pattern is compared to a simulated image generated from a pattern captured from a photomask manufactured from the original pattern. Alternatively, simulated images generated from captured data from two different instances of the same original pattern formed in a photomask are compared.

FREMGANGSMAATE FOR FREMSTILLING AV FARMAKOLOGISK AKTIVE TIAZOLDERIVATER.

Flat fastener for watch bracelet - has spring plate normally closing hook, with sliding ring to hold hook open

Duct for increasing aircraft lift - uses venturi to suck air off tops of wings to reduce boundary layer

Regeneration of metal plating soln. - using cell contg. anodic membrane and soluble metal anode

Elastic compressible electric contact material - changes its conductivity on compression and consists of sponge with air spaces and conducting particles embedded in it

Safety seal for offshore platform - has water tight doors to isolate living accommodation and ladder rungs inside legs of platform

Sprung railway vehicle suspension - has spherical ended rods housed in corresponding housings in support points for leaf springs

Cutter for combine harvester - has blade holders each comprising cylindrical body with external bush accommodating blade

DISPOSITIF ELECTRONIQUE DE CORRECTION DES DEFAUTS DE LINEARITE D'UNE CAMERA DE GAMMAGRAPHIE DE TYPE ANGER

DISPOSITIF DE MANOEUVRE POUR SIEGES ET FENETRES, NOTAMMENT DE VEHICULES AUTOMOBILES

SILENCIEUX POUR MOTEUR A COMBUSTION INTERNE

INTERRUPTEUR ELECTRIQUE A TOUCHE ET CLAVIER EQUIPE DE TELS INTERRUPTEURS

COMPOSES DERIVES DE L'ERGOLINE, PROCEDE POUR LES PREPARER ET LEUR USAGE COMME MEDICAMENTS

DERIVES DE 6-(PYRIDINYL)-PYRIDAZINE ET LEUR PREPARATION

DERIVES DE N4-CARBAMOYLPIPERAZINOPROPANOL UTILES POUR LEUR ACTIVITE DE B-BLOCAGE D'ADRENALINE

INSTALLATION POUR L'APPLICATION DE REVETEMENTS SUR DES PIECES A PARTIR DE POUDRE

COMPOSES INHIBITEURS DE LA BIOSYNTHESE DU CHOLESTEROL, LEUR PROCEDE DE PREPARATION ET LEUR APPLICATION THERAPEUTIQUE

AUTOMATIC CALLING METHODS AND APPARATUS

INFORMATION TRANSMISSION DEVICE THROUGH THE RAILS BETWEEN A RAILWAY TRACK AND A VEHICLE ASSEMBLY CIRCULATING ON THIS TRACK

ARRANGEMENT FOR PASSING A FIRST LIQUID CLOSE TO BUT WITHOUT MIXING IT WITH A SECOND LIQUID, FOR EXAMPLE AN ARRANGEMENT FOR SEA WATER DESALINATION