SUBSTRATE INSPECTION DEVICE,申请号JP19970015308-传众专利搜索

SUBSTRATE INSPECTION DEVICE

申请公布号：JPH10213522(A)

申请号：JP19970015308

申请日期：1997.01.29

申请公布日期：1998.08.11

申请人：

OLYMPUS OPTICAL CO LTD

发明人：SATO TAKU

分类号：G01M11/00;G02F1/133;(IPC1-7):G01M11/00

主分类号：G01M11/00

摘要：PROBLEM TO BE SOLVED: To perform stable substrate observation even if the vibration of a substrate is not sufficiently controlled by always displaying a substrate image having a high focusing degree at the time of outputting a timing signal in the manufacturing prosess for a large substrate such as a liquid crystal display. SOLUTION: When the focusing mechanism of an optical microscope 1 is fixed in a reference focus position for the observed surface of a sample, the wave form 35 of a focusing signal is displayed based on a positional relationship between an objective lens and a vibrated glass board. An image fetching trigger signal 36 is produced matching a focusing time appearing in the focusing signal 35 fetched by a timing generator, an image from a photographing device 3 is fetched in an image storage device 4 by the timing of the trigger signal 36 and this stored image is displayed and thus a still image having a high focusing degree is obtained to be used for observation of the substrate. Thus, even for observation of high magnification where the vibration of the glass board is not suppressed, since the image at the time of focusing is displayed as a still image, stable substrate observation is performed.