PHOTOSENSITIVE COMPOSITION
申请公布号:JPH1039511(A)
申请号:JP19960199154
申请日期:1996.07.29
申请公布日期:1998.02.13
发明人:KODAMA KUNIHIKO;AOSO TOSHIAKI
分类号:G03F7/004;C07C381/04;G03F7/00;G03F7/039;H01L21/027;(IPC1-7):G03F7/039
主分类号:G03F7/004
摘要:PROBLEM TO BE SOLVED: To obtain a photosensitive compsn. having high resolving power without deteriorating sensitivity and giving a resist pattern whose surface does not form a T-top with the lapse of time after exposure by incorporating a specified compd. SOLUTION: This photosensitive compsn. contains a compd. represented by formula I or II and generating an acid when irradiated with active light or radiation. In the formulae I, II (1) is 1-3, (m) is 2 or 3, A1 is cycloalkyl, -(CX2 )n -Z, etc., A2 is cycloakly or -(CX2 )a -A-(CX2 )b -Z in the case of 1=1, A2 is alkylene, arylene, etc., in the case of 1=2 or 3, Y1 has the same alkylene, arylene, etc., in the case of 1=2 or 3, Y1 has the same meaning as A2 in the case of 1=1, Y2 is cycloakylene, arylene, etc., (n) is 1-20, each of (a) and (b) is 0-20, X is H or halogen, Z is H, halogen aryl, etc., and A is a single bond, O, etc.
APPARATUS FOR PLATING METAL OBJECTS
BLENDING OF TEXTILE FIBROUS MATERIALS
REGENERATION OF METAL OXIDE CATALYSTS
STEAM GENERATOR USING RADIANT SUPERHEATER IN JILTING-BURNER FURNACE
AZO DERIVATIVES OF CARBOSTYRIL
VARIABLE RATIO POWER TRANSMISSION GEAR
CONTINUOUS CASTING AND PROCESS OF PRODUCING THE SAME
FLEXIBLE CONNECTION FOR RUNWAY GIRDERS
LATCHING ASSEMBLY FOR WINDOWS AND THE LIKE
MACHINE FOR APPLYING MATERIAL TO WALLS
Method and apparatus for building tire casings
Arrangement for measuring the power transmitted through an electromagnetic waveguide