FIELD EMISSION ELEMENT AND MANUFACTURE THEREOF,申请号JP19960081808-传众专利搜索

FIELD EMISSION ELEMENT AND MANUFACTURE THEREOF

申请公布号：JPH09274843(A)

申请号：JP19960081808

申请日期：1996.04.03

申请公布日期：1997.10.21

申请人：

YAMAHA CORP

发明人：HATTORI ATSUO

分类号：H01J9/02;H01J1/30;H01J1/304;H01L29/66;(IPC1-7):H01J1/30

主分类号：H01J9/02

摘要：<p>PROBLEM TO BE SOLVED: To manufacture a field emission negative electrode, which has a small vertical angle of a tip and a small curvature radius by giving distribution of thickness to a reaction control film. SOLUTION: Sacrifice films 16a, 16b made of SiO2 are anisotropically deposited on sacrifice films 15a, 15b by CVD method or spattering. The sacrifice film 16a is deposited at a nearly even thickness on the top surface of the sacrifice film 15a, which is formed of two parts, and in a side surface, thickness thereof is formed thick in an upper part and gradually reduced toward a lower part. At a part of a back of an over-hang part, the sacrifice film 16a is not deposited or deposited very thin. The sacrifice film 16b is deposited on the sacrifice film 15b. Each side surface of the over-hang part, which is formed of two parts, contacts with each other at a lower part of the side surface by a reaction film 16c, of which volume is expanded.</p>