Apparatus and method relating to ion implantation and heat transfer

申请公布号：EP0421728(B1)

申请号：EP19900310771

申请日期：1990.10.02

申请公布日期：1997.05.14

申请人：

SUPERION LIMITED

发明人：AITKEN, DEREK

分类号：H01L21/68;H01J37/317;H01L21/00;H01L21/265;(IPC1-7):H01L21/00;C23C14/50

主分类号：H01L21/68

LOWER EDGE MEMBER OF WALL, ETC.

ELECTROSTATIC SHOCK PREVENTIVE METHOD OF CARPET FLOOR

STEEL SHELL STRUCTURE IN METHOD OF CONSTRUCTION OF PREPACKED CONCRETE

SWITCHGEAR FOR DOOR

METHOD OF LIGHT-WEIGHT PREPACKED CONCRETE CONSTRUCTION

WORKING METHOD OF IN-SITU PILE

IMPACT PRINTER

SHEET FOR PEELING OFF

SORTER FOR FRUITS

CONTROL APPARATUS IN GRAIN SORTER

DEVICE FOR COATING BAR-SHAPED MATERIAL

APPARATUS FOR EXTRACTING SAMPLE GRAIN IN HULLER OR THE LIKE

DRYING AND WASHING MACHINE

EXCHANGING SYSTEM FOR GAME PRIZE

ENDOSCOPE

FASTENER IN SKI BOOTS OF REAR-ENTRY TYPE

CONTROLLER FOR TEMPERATURE WITHIN GREENHOUSE

APPARATUS FOR CONTROLLING LATERAL LEVEL OF PADDY FIELD WORKING MACHINE

SEEDING MACHINE

CONTROL DEVICE FOR TILLING DEPTH FOR TRACTOR