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INTERATOMIC FORCE MICROSCOPE

申请公布号:JPH08278317(A)

申请号:JP19950083626

申请日期:1995.04.10

申请公布日期:1996.10.22

申请人:
NIKON CORP

发明人:NAKANO KATSUSHI

分类号:G01B11/30;G01B21/30;G01N37/00;G01Q10/04;G01Q20/02;G01Q60/24;H01J37/28;(IPC1-7):G01N37/00

主分类号:G01B11/30

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