HYDRIDE GAS REMOVING METHOD AND APPARATUS

申请公布号：WO1996004064(P1)

申请号：JP1995001553

申请日期：1995.08.04

申请公布日期：1996.02.15

摘要：<p>Hydride gas removing method and apparatus which are capable of detoxifying a mixed gas by completely removing various hydride gases therefrom by using a simple structure without generating pulverized bodies which would cause the clogging of the apparatus. The method is characterized in that a mixed gas containing at least two kinds of hydride gases is brought into contact with nickel fluoride and nickel to subject the hydride gases to decomposition or/and adsorption, whereby the hydride gases are removed. The method is also characterized in that a gas of a hydride of a group III or V element in the periodic table is removed by bringing the gas into contact with nickel so as to subject the gas to decomposition or/and adsorption, whereby the hydride gas is removed.</p>

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