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CHEMICAL VAPOR GROWTH APPARATUS

申请公布号:JPH0567574(A)

申请号:JP19910227630

申请日期:1991.09.09

申请公布日期:1993.03.19

申请人:
FUJITSU LTD

发明人:ISHITA MASAJI

分类号:H01L21/205;H01L21/285;H01L21/31

主分类号:H01L21/205

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