Flow controller

申请公布号：US4877051(A)

申请号：US19880277030

申请日期：1988.11.28

申请公布日期：1989.10.31

申请人：

MKS INSTRUMENTS, INC.

发明人：DAY, CHRISTOPHER C.

分类号：G05D7/06

主分类号：G05D7/06

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