DEVELOPMENT DEVICE,申请号JP19870106125-传众专利搜索

DEVELOPMENT DEVICE

申请公布号：JPS63271930(A)

申请号：JP19870106125

申请日期：1987.04.28

申请公布日期：1988.11.09

申请人：

TOKYO ELECTRON LTD

发明人：MATSUOKA FUMINORI

分类号：H01L21/30;G03F7/00;G03F7/30;H01L21/027

主分类号：H01L21/30

摘要：PURPOSE:To enable a developer to be sealed by a method wherein a hole part of cup member is closed with a processed body chuck to seal a dip vessel. CONSTITUTION:The title device is provided with a cup member 30 comprising a recession 31 formed into a dip vessel to dip-develop a processed body 10 with a hole part 30A as well as a processed body chuck 40 chucking the body 10 with a chuck part 40B in larger diameter than that of the hole part 30A to be arranged in the recession 31 held by an axle part 40A inserted into the hole part 30A. Besides, the cup member 30 and the processed body chuck 40 are structured to be lifted relatively as well as to close the hole plart 30A with the processed body chuck 40 for sealing the dip vessel. Through these procedures, the seal of a developer sufficient for dip development can be secured easily.