STROBOSCOPIC SCANNING ELECTRON MICROSCOPE,申请号JP19810021498-传众专利搜索

STROBOSCOPIC SCANNING ELECTRON MICROSCOPE

申请公布号：JPS57136753(A)

申请号：JP19810021498

申请日期：1981.02.18

申请公布日期：1982.08.23

申请人：

TOKYO SHIBAURA DENKI KK

发明人：MINAGAWA TSUTOMU;KITAOKA SHIYUUJI;ISHIKAWA MITSUAKI

分类号：H01J37/22;H01J37/26;H01J37/28

主分类号：H01J37/22

摘要：PURPOSE:To minimize the beam irradiation time and reduce the effect due to the irradiation effect on elements by detecting secondary electrons from pulse beam irradiation with a detector, and inputting and treating outputs form it to a peak-holding circuit. CONSTITUTION:A storoboscopic scanning electron microscope 1 and scan controller 12 are operated by controlling a controller 10 with a computer 8. The peak value of analogue output signal form a secondary electron detector 2 of the electron microscope 1 is holded with a high speed type peak-holding circuit 3, and it is converted to digital signal with a convertor 6 and input to the computer 8 and displayed on a CRT14 as an image. Thus data are input to the computer 8 for each beam, the beam irradiation time can be minimized, and the reverse effect on elements which are sensitive to the effect of beam such as MOS element can be reduced.