MANUFACTURE OF AMORPHOUS SOLAR CELL,申请号JP19890083281-传众专利搜索

MANUFACTURE OF AMORPHOUS SOLAR CELL

申请公布号：JPH02260666(A)

申请号：JP19890083281

申请日期：1989.03.31

申请公布日期：1990.10.23

申请人：

MITSUBISHI ELECTRIC CORP

发明人：SASAKI HAJIME

分类号：H01L31/04;H01L21/205

主分类号：H01L31/04

摘要：PURPOSE:To obtain an a-SiGe:H film of high quality so as to improve a solar cell of this design in efficiency by a method wherein the surface of the a-SiGe:H film is subjected to an Ar treatment. CONSTITUTION:Ar gas used in conjunction with raw gas enables Ge of an SiGe:H to be combined with much hydrogen. While an Ar plasma or an Ar<+> sputtering treatment is carried out in a process that the layers of an SiGe:H film are formed, Ge is combined with much hydrogen. Sunlight rays 1 are absorbed in an a-Si cell 3 composed of a P layer 3, an i layer 3b, and an N layer 3c passing through a transparent electrode 2. The light rays not absorbed by the cell 3 are absorbed in an a-SiGe cell 4 composed of a P layer 4a, an i layer 4b, and an N layer 4c. By this setup, sunlight rays in a wide range of wavelength can be effectively used.