Mass spectrometer,申请号US201514611682-传众专利搜索

Mass spectrometer

申请公布号：US9368335(B1)

申请号：US201514611682

申请日期：2015.02.02

申请公布日期：2016.06.14

申请人：

Thermo Finnigan LLC

发明人：Quarmby Scott T.;Tehlirian Berg A.

分类号：H01J49/24;H01J49/04;F04D19/04

主分类号：H01J49/24

代理人：Schell David A.

地址：San Jose CA US

摘要：A mass spectrometer system can include a vacuum manifold and a high vacuum pump. The vacuum manifold can include a foreline chamber and a high vacuum chamber. The foreline chamber can have a source inlet, a foreline inlet, and a foreline outlet. The high vacuum pump can have a vacuum port coupled to high vacuum chamber, and a foreline port coupled to the foreline inlet.

主权项：1. A mass spectrometer system, comprising: a vacuum manifold including: a foreline chamber having a source inlet, a foreline inlet, and a foreline outlet; anda high vacuum chamber; and a high vacuum pump having a vacuum port coupled to high vacuum chamber; anda foreline port coupled to the foreline inlet, wherein gases from the high vacuum pump flow through the foreline chamber and out to a foreline pump via the foreline outlet.