VAPORIZATION SUPPLY APPARATUS

申请公布号：WO2016174832(A1)

申请号：WO2016JP01967

申请日期：2016.04.11

申请公布日期：2016.11.03

申请人：

FUJIKIN INCORPORATED

发明人：HIDAKA, Atsushi;NAGASE, Masaaki;HIRATA, Kaoru;SUGITA, Katsuyuki;NAKATANI, Takatoshi;YAMASHITA, Satoru;NISHINO, Kouji;IKEDA, Nobukazu;HIRAO, Keiji

分类号：C23C16/448;B01J4/00;B01J7/02;C23C16/52;H01L21/31

主分类号：C23C16/448

摘要：[Problem] To provide a vaporization supply apparatus capable of preventing a problem that a gas flow path extending from within a vaporizer to a flow rate control device is filled with a liquid. [Solution] This vaporization supply apparatus is provided with: a vaporizer 2 that heats and vaporizes a liquid L; a flow rate control device 3 that controls the flow rate of gas sent from the vaporizer; a first control valve 5 interposed in a path 4 for supplying the liquid to the vaporizer 2; a pressure detector 6 for detecting the pressure of gas that is vaporized by the vaporizer 2 and sent to the flow rate control device 3; a liquid detection unit 7A that measures a parameter of a volume of liquid exceeding a predetermined volume in the vaporizer 2; and a control device 8 that controls the first control valve 5 so as to supply a predetermined volume of the liquid L to the vaporizer 2 on the basis of a pressure value detected by the pressure detector 6, and controls so as to close the first valve 5 when the liquid detection unit 7A detects the liquid.

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