Deposition apparatus, organic light emitting display apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus,申请号US201414230523-传众专利搜索

Deposition apparatus, organic light emitting display apparatus, and method of manufacturing organic light emitting display apparatus using the deposition apparatus

申请公布号：US9455170(B2)

申请号：US201414230523

申请日期：2014.03.31

申请公布日期：2016.09.27

申请人：

SAMSUNG DISPLAY CO., LTD.

发明人：Kim Sang-Youn;Lee Myung-Ki;Jeong Sang-Yong

分类号：H01L51/00;H01L21/677

主分类号：H01L51/00

代理机构：

Lee & Morse, P.C.

代理人：Lee & Morse, P.C.

地址：Yongin, Gyeonggi-do KR

摘要：A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.

主权项：1. A method of manufacturing an organic light-emitting display apparatus, the method comprising: transferring a moving unit into a chamber by a first transfer unit that is installed so as to enter the chamber in a state where a substrate is fixed to the moving unit; forming a layer by causing deposition materials discharged from a plurality of deposition assemblies to be sequentially deposited onto the substrate while the first transfer unit transfers the substrate with respect to the plurality of deposition assemblies in a state where the substrate is separated from the plurality of deposition assemblies disposed within the chamber at a predetermined distance; and returning the moving unit separated from the substrate by a second transfer unit that is installed so as to enter the chamber, wherein each of the plurality of deposition assemblies includes: a deposition source configured to emit the deposition material; a deposition source nozzle unit that is disposed toward the first transfer unit from the deposition source and has a deposition source nozzle formed therein; a patterning slit sheet that is disposed so as to face the deposition source nozzle unit and in which a plurality of patterning slits are disposed in one direction; a positional information obtaining unit configured to obtain positional information regarding a position of the substrate on the moving unit transferred by the first transfer unit; and a sheet stage configured to adjust a position of the patterning slit sheet with respect to the substrate on the moving unit transferred by the first transfer unit, and wherein the forming of a layer includes depositing material onto the substrate while adjusting the position of-the patterning slit sheet by the sheet stage, according to the positional information obtained by the positional information obtaining unit.