OXYGEN SENSOR ELEMENT AND PRODUCTION THEREOF,申请号JP19910274801-传众专利搜索

OXYGEN SENSOR ELEMENT AND PRODUCTION THEREOF

申请公布号：JPH0587771(A)

申请号：JP19910274801

申请日期：1991.09.26

申请公布日期：1993.04.06

申请人：

RIKEN CORP

发明人：KUNIMOTO AKIRA

分类号：G01N27/41

主分类号：G01N27/41

摘要：PURPOSE:To provide an oxygen sensor element characterized by that the adhesion of a substrate, an electrode film and a solid electrolyte film is markedly enhanced and the porosity and pore size of the electrode and solid electrolyte film formed on the aluminum membrane provided to the substrate can be controlled only by changing the thickness of said membrane and capable of accurately controlling a limit current value. CONSTITUTION:In an oxygen sensor element, an alumina membrane 5 having fine projections is formed to one surface of a dense insulating substrate 2 and a porous membrane like cathode 3a, a porous solid electrolyte membrane 4 having oxygen ion conductivity and capable of diffusing oxygen gas and a porous membrane like anode 3b capable of diffusing oxygen gas are successively laminated to said membrane 5. The alumina membrane 5 having fine projections is obtained by forming an aluminum membrane to one surface of the substrate 2 and treating said membrane with hot water before baking the same in an oxidative atmosphere.