MICROMIRROR APPARATUS AND METHODS,申请号US201615160157-传众专利搜索

MICROMIRROR APPARATUS AND METHODS

申请公布号：US2016266377(A1)

申请号：US201615160157

申请日期：2016.05.20

申请公布日期：2016.09.15

申请人：

TEXAS INSTRUMENTS INCORPORATED

发明人：McDonald William C.;Hall James N.;Reed Mark F.;Barron Lance W.;Bartlett Terry A.;Agrawal Divyanshu

分类号：G02B26/08;G09G3/34

主分类号：G02B26/08

地址：DALLAS TX US

摘要：In described examples, a DMD includes an array of micromirror pixels. Each pixel includes a right electrode on a first side of the pixel, a left electrode on a second side of the pixel adjacent the first side, and a cantilevered beam supporting a mirror. The cantilever beam tilts on two axes of translation: pitch and roll. The mirror has: a first landed position (on a first and second spring tip) over the right electrode; and a second landed position (on the first and a third spring tip) over the left electrode, such that the first landed position and the second landed positions are 90° apart. In transitioning from the first landed position to the second landed position, the mirror maintains contact with the first spring tip while rolling from the second spring tip to the third spring tip.

主权项：1. A digital micromirror device (DMD) having an array of micromirror pixels, each pixel comprising: a first electrode located on a first side of the pixel; a second electrode located on a second side of the pixel, wherein the second side is adjacent the first side; a first spring tip located between the first electrode and the second electrode; a second spring tip on an opposite side of the first electrode from the first spring tip; a third spring tip on an opposite side of the second electrode from the first spring tip; a cantilevered beam supporting a micromirror, such that in a first landed position the micromirror contacts the first and second spring tip and in a second landed position the micromirror contacts the first and third spring tip.