OPTICAL DEVICE,申请号JP20060058499-传众专利搜索

OPTICAL DEVICE

申请公布号：JP2007240546(A)

申请号：JP20060058499

申请日期：2006.03.03

申请公布日期：2007.09.20

申请人：

SEIKO EPSON CORP

发明人：YODA MITSUHIRO

分类号：G02B26/10;G02B26/08

主分类号：G02B26/10

摘要：PROBLEM TO BE SOLVED: To provide an optical device which is stably driven. SOLUTION: The optical device has: a movable part which has a light reflection part and is turnably arranged; and a driving means which drives the movable part, wherein an object is scanned with the light which is reflected on the light reflection part by turning the movable part with the driving means. The optical device is characterized in that a cooling means for cooling the movable part is included, a flow channel to circulate a cooling agent in the moving part is formed, and the flow channel constitutes the cooling means. COPYRIGHT: (C)2007,JPO&INPIT