HEATER,申请号JP19880225941-传众专利搜索

HEATER

申请公布号：JPH0273619(A)

申请号：JP19880225941

申请日期：1988.09.08

申请公布日期：1990.03.13

申请人：

TERU KYUSHU KK

发明人：NOMURA MASAFUMI;KAMIKAWA YUJI;YOSHIOKA KAZUTOSHI

分类号：G03F7/40;G03F7/26;G03F7/42;H01L21/027;H01L21/30

主分类号：G03F7/40

摘要：PURPOSE:To make heating temperature uniform by substantially equalizing the temperatures of a plurality of supporting rods for floating an element to be treated from a heat generator to the temperature of the generator by controlling a rodlike heater provided in the rod. CONSTITUTION:A heating plate 5 is moved down by an elevator mechanism 4, and pins 8 are raised to be floated from the plate 5. An LCD board 3 is placed on the ends of the pins 8 to be supported. The pins 8 are moved down, the board 3 is placed on the plate 5 to be held in contact therewith. Then, a heater 7 contained in the plate 5 is controlled by a temperature regulating mechanism 6, and the surface temperature of the board 3 is heated to a predetermined range. Simultaneously rod-like heaters 9 contained in the pins 8 are controlled by a pin temperature control mechanism 10 to heat the pins 8 to the temperature substantially equal to that of the plate 5. Thus, the board 3 disposed near the pin through holes 31 of the pins 8 of the plate 5 is also heated by the radiated heat from the ends of the pins 8, and the surface temperature become uniform in the same degree as that of the periphery.