MICROMECHANICAL MEASURING ELEMENT

申请公布号：JP2016188863(A)

申请号：JP20160101010

申请日期：2016.05.20

申请公布日期：2016.11.04

申请人：

EPCOS AG

发明人：BERNHALD OSTRICK;MICHAEL SCHIFFER

分类号：G01L13/06;B81B3/00;G01L9/00;H01L29/84

主分类号：G01L13/06

摘要：PROBLEM TO BE SOLVED: To provide a micromechanical measuring element capable of eliminating a protection device for an expensive electrical contact.SOLUTION: A micromechanical measuring element 1 has a sensitive element 2. The sensitive element includes a membrane 21 with an under side 211 and an upper side 212. The micromechanical measuring element 1 also includes a cap 3 which is connected directly to the sensitive element 2. The sensitive element 2 and the cap 3 form a first chamber 4. The first chamber includes a first opening 5 passing through the cap 3.SELECTED DRAWING: Figure 2

BROKEN WHEAT RECOVERY SYSTEM

6,6'-ALKYLIDENE BIS - (2 - ISOBORNYL- 4 - METHYL PHENOL) AS ANTIOXYDANT FOR UNSATURATED COMPOUNDS

STABILIZATION OF ROAD SURFACES

STAPLING MACHINE

LEVER ACTUATED PRESSURE REGULATOR

FAIL-SAFE ELECTRICAL SYSTEM

HEATER HAVING A FIRE CONTROL DAMPER

TWO-STAGE MASTER CYLINDER FOR HYDRAULIC SYSTEMS

APPARATUS AND METHOD FOR PRODUCING CONTINUOUS METAL STRIPS

LINEAR AROMATIC POLYESTER PLASTICIZED WITH A BIS ARALKYL ETHER

IMPULSE SENDERS

TUBULATION AND GLASS EJECTION SYSTEM

INTERCARRIER WAVE TRANSLATION CIRCUITS

POLYVALENT METAL LAKES OF MONOAZO DYESTUFFS

APPARATUS FOR THE COMBUSTION OF FLUID COKE

SCORING FILMS OF POLYMERIC MATERIALS TO PRODUCE FILAMENTS

DELAY ELEMENTS FOR BLASTING CAPS

PHENOTHIAZINE DERIVATIVES AND THEIR PREPARATION

SHORT OIL MODIFIED ALKYD RESIN SURFACE COATING MATERIALS AND PROCESSES FOR PREPARING THE SAME

CLAMPING CONNECTIONS FOR FRAMEWORK