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ETCHING METHOD

申请公布号:JPS57104665(A)

申请号:JP19800179762

申请日期:1980.12.18

申请公布日期:1982.06.29

申请人:
MATSUSHITA DENKI SANGYO KK

发明人:UENO ATSUSHI

分类号:C23F4/00;C23F1/00;H01L21/302;H01L21/3065

主分类号:C23F4/00

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