FORMATION OF METAL OXIDE FILM,申请号JP19880017588-传众专利搜索

FORMATION OF METAL OXIDE FILM

申请公布号：JPH01191786(A)

申请号：JP19880017588

申请日期：1988.01.28

申请公布日期：1989.08.01

申请人：

HOYA CORP

发明人：UCHIDA KATSUAKI;HARA KOICHI

分类号：C23C18/12;C23C20/06;C23C24/08

主分类号：C23C18/12

摘要：PURPOSE:To easily obtain a metal oxide film with high efficiency by applying a liq. mixture contg. >=1 kind among metal oxides and metal carbonates and a dispersant on a substrate, and keeping the material at a temp. where the metal compd. is sintered. CONSTITUTION:A coating soln. contg. >=1 kind among metal oxides and metal carbonates and a dispersant is applied on the substrate of glass, metal, and ceramics, etc., having a hard surface. The metal elements from the second period series to the sixth period series of groups Ia, IIa, IIIa, IIIb, IVb, Vb, VIb, VIII, Ib, IIb, IIIa, IVa, and Va of the periodic table are preferably used as the metal components in the metal oxides and metal carbonates. A polyhydric alcohol such as EG is preferably used as the dispersant. The applied soln. is heated at a temp. where the soln. causes a solid-phase reaction and sinters. By this method, a metal oxide film can be extremely conveniently formed on the substrate.